Merck announced on the 30th that it opened a Korean Advanced Technology Center (K-ATeC) in Songtan Industrial Complex in Pyeongtaek, Gyeonggi-do.
The technology center will accelerate the research and development of CMP slurry and post-CMP cleaning to support semiconductor production customers. Chemical Mechanical Polishing, or CMP is an indispensable technique for fabricating integrated circuits. During the CMP process, a wafer surface is polished using a slurry. The abrasive particles in the slurry grind against the sample surface, loosening material. The chemicals in the slurry then etch and dissolve the material.
The center is all 5 stories and covers an area of 3240m². It is composed of a clean room equipped with a sampling lab for customer evaluation, CMP material design and analysis research lab, EBARA F-REX300X 300mm CMP wafer polishing system, and SP5 wafer defect inspection equipment.
Merck is accelerating CMP testing of new materials and supply of materials for the semiconductor industry through investment in the Korea Advanced Technology Center. In addition to the state-of-the-art technology center, the Pyeongtaek plant has a’Best In Class (which has the best efficacy in certain drugs)’ manufacturing center for next-generation CMP materials. The Pyeongtaek plant is close to the Korean customer base, enabling collaboration and support within the region.
The Merck Functional Materials Division launched a semiconductor solution as a customer-oriented new organization on the 1st of this month. Merck has completed the acquisition of Versium Materials and Intermolecular and can offer a broad portfolio of wafer processing steps.
“In addition to materials, we have gained expertise in delivery tools, equipment, containers and services,” said Merck. “The functional materials division seeks to accelerate material innovation with inter-molecular technology.” “The advanced data analysis and experiment platform provides researchers with high-quality comprehensive support and helps customers make material decisions after device testing.”
“We have invested more than 35 billion won to complete the technology center and expand our capabilities,” said Anand Nambia, global vice president and senior vice president of semiconductor materials business under the Merck Functional Materials Division. “Merck is deeply interested in fostering basic research for the advancement of electronics industry technology,” said Glenn Young, CEO of Merck Korea.